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Applications / Results
- Applications / Results
- Vacuum robot
- CVD equipment
- Sputtering system
- Ion implanter
- Single crystal pulling equipment
- Vacuum chuck
- Etching system
- Epitaxial growth system
- Roll-to-roll film forming equipment
- X-ray generator
- Stirrer
- Gas introduction mechanism
- Arc discharger
- Vacuum furnace / Pressurized furnace
- New development