Ideal for sample adsorption

• Samples can be firmly adsorbed without any damage during wafer or LC glass transportation, or during instantaneous high-speed rotation using a spin coater.
• Vacuuming through a magnetic seal can eliminate the unnecessary space, which not only brings an advantage of downsizing of the equipment as a whole but also provides stable rotation performance. For this reason, the demand in magnetic seals for vacuum chuck has been gradually increasing.