Magnetic fluid seals able to withstand high-temperature active gases

We have been offering many magnetic fluid seals to major CVD equipment manufacturers for a long time and they have been officially applying to their products.
As a result of considerable time researching and tests based on these experiences, we have succeeded in developing a new magnetic fluid which hardly generates any out gas even at high temperatures. With this new magnetic fluid and the improved magnetic fluid seal structure, we can provide a long-life magnetic fluid seal unit for CVD equipment specifications for which the use of seals was conventionally regarded as impossible.

Furthermore, our high-precision processing technologies and highly-skilled assembly works ensure a constant supply of a more uniform and smooth rotation of magnetic seals, contributing to the formation of a film with uniform thickness.